Silicon UniversitySEMICONDUCTOR MANUFACTURING About the project
Fab Flow
  1. 101 Quartzite
  2. 102 Ingot
  3. 103 Wafering
  4. 104 FEOL
  5. 105 BEOL
  6. 106 Packaging

Silicon University / Track B matrix

04

Surface Chemistry, Ultra-Clean Wet Processing & Contamination Control

Pillar 04 of 8, three topics, nine articles: rca wet cleans & dilute chemistry, wet bench vs single-wafer processing, particle removal & zeta potential engineering.

3 topics9 articles 3 tiers
Engineer in a bunny suit loading a wafer cassette into a glass-fronted automated inspection tool
FABLoading a wafer pod into an automated inspection tool