Track A · guided path
Follow one silicon atom through the fab
24 steps in manufacturing order, each with three depth tiers. Start at step 01 or jump straight to the unit operation you need. About 21 hours of reading end to end.
101
01Quartzite Extraction & Carbothermic ReductionPillar 1 · Substrate Synthesis · 3 tiers47 min →02Chemical Purification & the Siemens ProcessPillar 1 · Substrate Synthesis · 3 tiers52 min →03Monocrystalline Growth: Czochralski & Float ZonePillar 1 · Substrate Synthesis · 3 tiers57 min →Quartzite
102
04Ingot Mechanical Processing & Geometric ConditioningPillar 2 · Wafering & Ingots · 3 tiers40 min →05Multi-Wire Diamond Sawing & Wafer SlicingPillar 2 · Wafering & Ingots · 3 tiers41 min →06Edge Profiling, Lapping & Stress-Relief EtchingPillar 2 · Wafering & Ingots · 3 tiers44 min →Ingot
103
07Oxide & Polysilicon CMPPillar 3 · CMP & Planarization · 3 tiers55 min →08Copper Damascene & Barrier CMPPillar 3 · CMP & Planarization · 3 tiers60 min →09Slurry, Pad Conditioning & CMP MetrologyPillar 3 · CMP & Planarization · 3 tiers61 min →Wafering
104
10RCA Wet Cleans & Dilute ChemistryPillar 4 · Wet Processing · 3 tiers55 min →11Wet Bench vs Single-Wafer ProcessingPillar 4 · Wet Processing · 3 tiers58 min →12Particle Removal & Zeta Potential EngineeringPillar 4 · Wet Processing · 3 tiers62 min →13DUV Immersion Lithography (193i)Pillar 5 · Photolithography · 3 tiers52 min →14EUV & High-NA EUV LithographyPillar 5 · Photolithography · 3 tiers58 min →15Computational Lithography & OPCPillar 5 · Photolithography · 3 tiers56 min →16Reactive Ion Etching & Plasma PhysicsPillar 6 · Plasma Etching · 3 tiers55 min →17Atomic Layer EtchingPillar 6 · Plasma Etching · 3 tiers52 min →18High-Aspect-Ratio Plasma EtchingPillar 6 · Plasma Etching · 3 tiers56 min →19Thermal Oxidation & Gate Dielectric GrowthPillar 7 · Deposition & Thermal · 3 tiers55 min →20ALD & High-k Metal Gate StacksPillar 7 · Deposition & Thermal · 3 tiers59 min →21Ion Implantation & Thermal AnnealingPillar 7 · Deposition & Thermal · 3 tiers62 min →FEOL
