Silicon University / Track B matrix
06
Plasma Etching & Atomic-Scale Material Removal
Pillar 06 of 8, three topics, nine articles: reactive ion etching & plasma physics, atomic layer etching, high-aspect-ratio plasma etching.
3 topics9 articles
3 tiers
Topic 6.1 · Reactive Ion Etching & Plasma Physics
Topic 6.2 · Atomic Layer Etching
Topic 6.3 · High-Aspect-Ratio Plasma Etching
