Silicon UniversitySEMICONDUCTOR MANUFACTURING About the project

Fab Flow

101 Quartzite
102 Ingot
103 Wafering
104 FEOL
105 BEOL
106 Packaging

Silicon University / Track B matrix

05

Advanced Photolithography & Computational Optics

Pillar 05 of 8, three topics, nine articles: duv immersion lithography (193i), euv & high-na euv lithography, computational lithography & opc.

3 topics9 articles 3 tiers

Topic 5.1 · DUV Immersion Lithography (193i)

3 articles · 3 tiers · Track A step 13

Tier 1DUV Immersion Lithography (193i): Fundamentals of High-NA Fluidic Patterning12 min

Tier 2DUV Scanner Optics & Water Immersion Hood Mechanics18 min

Tier 3Hyper-NA Fluid Dynamics, Polarization Effects & Line-Edge Roughness Physics22 min

Topic 5.2 · EUV & High-NA EUV Lithography

3 articles · 3 tiers · Track A step 14

Tier 1Extreme Ultraviolet (EUV) Lithography: Fundamentals of 0.33 NA & 0.55 High-NA Systems14 min

Tier 2EUV Tin Plasma Source & Anamorphic Mirror System Mechanics20 min

Tier 3High-NA Anamorphic Optics, Mask 3D Effects & EUV Flare Physics24 min

Topic 5.3 · Computational Lithography & OPC

3 articles · 3 tiers · Track A step 15

Tier 1OPC, Computational Lithography & Photoresist Fundamentals12 min

Tier 2OPC Reticle Enhancement, Model Calibration & CAR Processing Mechanics18 min

Tier 3Inverse Lithography (ILT), CAR Acid Blur & Photon Stochastics Physics26 min

Engineer in a cleanroom suit holding a cassette at an open lithography tool inside a yellow-light bay — FABEngineer at a lithography tool in a yellow-light bay