Silicon University / Track B matrix
07
Dielectric Deposition, Gate Stack Engineering & Thermal Processing
Pillar 07 of 8, three topics, nine articles: thermal oxidation & gate dielectric growth, ald & high-k metal gate stacks, ion implantation & thermal annealing.
3 topics9 articles
3 tiers
Topic 7.1 · Thermal Oxidation & Gate Dielectric Growth
Topic 7.2 · ALD & High-k Metal Gate Stacks
Topic 7.3 · Ion Implantation & Thermal Annealing
